MEMS/Micromachining

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Technology Map Detailed Contents May 2018

Importance of the Technology

The Technology in Brief

  • Advantages
  • Disadvantages
  • Silicon-Micromachining Processes
    • Bulk Micromachining
    • Surface Micromachining
    • Chemical-Vapor Deposition
    • Sputtering
    • Lithography
    • Wet and Dry Etching
    • Wafer Bonding
  • CMOS-based Micromachining
  • Other Micromachining Processes
    • LIGA Process
    • Other Micromolding Processes
    • Additive Manufacturing
    • Laser Micromachining
    • Micro EDM
    • Print Forming
  • Micromachining Materials
    • Nonsilicon Materials
    • Wear-Resistant Materials
  • Sensing Principles
    • Piezoresistivity
    • Piezoelectricity
    • Capacitive Sensing
  • Actuation Mechanisms
    • Electrostatic
    • Magnetic
    • Piezoelectric
    • Thermal
    • Artificial-Muscle and Electroactive-Polymer
  • Common MEMS Devices
    • Pressure Sensors
    • Accelerometers
    • Gyroscopes
    • Inertial Measurement Units
    • Micromirrors
    • Microphones
  • MEMS-Manufacturing Measurement Needs
  • MEMS/Nano Interfaces

Commercial Development Parameters

  • Demand Factors
    • Automotive Industry
    • Consumer Electronics and Wireless Devices
    • Health-Care Expenditures
    • Increasing Bandwidth
  • General Constraints
    • Cost
    • Lack of Market Pull
    • Technical Immaturity
    • Packaging
  • Synergistic Technologies
    • IC Technology
    • SOI Wafers
    • Packaging
  • Competing Technologies
    • Nanotechnology
    • Conventional Approaches
    • Enhanced Machine Vision
  • Required Resources
    • Access to Manufacturing
    • Multidisciplinary Approach
    • Design and Modeling
  • Regulatory Factors
    • Safety and Security
    • Health-Care Approval
    • Environmental Legislation

Areas to Monitor

  • Packaging
  • Foundry Services
  • Smart Sensors
  • 3D Manufacturing
  • SoC or SIP?
  • Market Demand
  • Sensor Commoditization
  • Media Compatibility
  • Development of New Materials
  • Health Care
  • Wireless Networking
  • Upscaling or Downscaling
  • NEMS
  • Homeland Security

Implications of Commercialization

  • The Connected Home
  • Sensors for Harsh Environments
  • Health Care and Drug Development
  • Storage and Telecom Components
  • Portable Devices for Environmental Sensing
  • Implantable Medical Devices
  • Use of Biological Analogies

Opportunities

  • Overview
  • Sensors
    • Advantages of Microfabricated Sensors
    • Disadvantages
    • Industry Structure
    • Commercial Opportunities
    • Automotive Sensors
    • Industrial Applications
    • Consumer Applications
    • Biomedical Applications
    • Unmanned Aerial Vehicles
  • Silicon Microphones
    • Industry Structure
    • Commercial Opportunities
  • Magnetic Hard-Disk-Drive Storage
    • Industry Structure
    • Commercial Opportunities
  • Optical-Data Storage
  • Projection Displays
  • MEMS Flat-Panel Displays
  • Scanning-Based Imaging
  • Compound-Eye Cameras
  • Optical Communications
    • Industry Structure
    • Commercial Opportunities
  • Interconnects
  • Process Control
  • Microfiltration
  • Microfluidics
  • Drug-Delivery Systems
  • DNA Chips
    • Industry Structure
    • Commercial Opportunities
  • Lab on a Chip
    • Industry Structure
    • Commercial Opportunities
  • Microreactors
    • Industry Structure
    • Commercial Opportunities
  • Microenergy Sources
    • Industry Structure
    • Commercial Opportunities

Updates

Viewpoints Features

Abbreviations