MEMS/Micromachining
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Technology Map Detailed Contents May 2018
Importance of the Technology
The Technology in Brief
- Advantages
- Disadvantages
- Silicon-Micromachining Processes
- Bulk Micromachining
- Surface Micromachining
- Chemical-Vapor Deposition
- Sputtering
- Lithography
- Wet and Dry Etching
- Wafer Bonding
- CMOS-based Micromachining
- Other Micromachining Processes
- LIGA Process
- Other Micromolding Processes
- Additive Manufacturing
- Laser Micromachining
- Micro EDM
- Print Forming
- Micromachining Materials
- Nonsilicon Materials
- Wear-Resistant Materials
- Sensing Principles
- Piezoresistivity
- Piezoelectricity
- Capacitive Sensing
- Actuation Mechanisms
- Electrostatic
- Magnetic
- Piezoelectric
- Thermal
- Artificial-Muscle and Electroactive-Polymer
- Common MEMS Devices
- Pressure Sensors
- Accelerometers
- Gyroscopes
- Inertial Measurement Units
- Micromirrors
- Microphones
- MEMS-Manufacturing Measurement Needs
- MEMS/Nano Interfaces
Commercial Development Parameters
- Demand Factors
- Automotive Industry
- Consumer Electronics and Wireless Devices
- Health-Care Expenditures
- Increasing Bandwidth
- General Constraints
- Cost
- Lack of Market Pull
- Technical Immaturity
- Packaging
- Synergistic Technologies
- IC Technology
- SOI Wafers
- Packaging
- Competing Technologies
- Nanotechnology
- Conventional Approaches
- Enhanced Machine Vision
- Required Resources
- Access to Manufacturing
- Multidisciplinary Approach
- Design and Modeling
- Regulatory Factors
- Safety and Security
- Health-Care Approval
- Environmental Legislation
Areas to Monitor
- Packaging
- Foundry Services
- Smart Sensors
- 3D Manufacturing
- SoC or SIP?
- Market Demand
- Sensor Commoditization
- Media Compatibility
- Development of New Materials
- Health Care
- Wireless Networking
- Upscaling or Downscaling
- NEMS
- Homeland Security
Implications of Commercialization
- The Connected Home
- Sensors for Harsh Environments
- Health Care and Drug Development
- Storage and Telecom Components
- Portable Devices for Environmental Sensing
- Implantable Medical Devices
- Use of Biological Analogies
Opportunities
- Overview
- Sensors
- Advantages of Microfabricated Sensors
- Disadvantages
- Industry Structure
- Commercial Opportunities
- Automotive Sensors
- Industrial Applications
- Consumer Applications
- Biomedical Applications
- Unmanned Aerial Vehicles
- Silicon Microphones
- Industry Structure
- Commercial Opportunities
- Magnetic Hard-Disk-Drive Storage
- Industry Structure
- Commercial Opportunities
- Optical-Data Storage
- Projection Displays
- MEMS Flat-Panel Displays
- Scanning-Based Imaging
- Compound-Eye Cameras
- Optical Communications
- Industry Structure
- Commercial Opportunities
- Interconnects
- Process Control
- Microfiltration
- Microfluidics
- Drug-Delivery Systems
- DNA Chips
- Industry Structure
- Commercial Opportunities
- Lab on a Chip
- Industry Structure
- Commercial Opportunities
- Microreactors
- Industry Structure
- Commercial Opportunities
- Microenergy Sources
- Industry Structure
- Commercial Opportunities